針對(duì)半導(dǎo)體擴(kuò)散爐溫度控制問(wèn)題，提出采用RBF 神經(jīng)網(wǎng)絡(luò)控制方法。RBF 神經(jīng)網(wǎng)絡(luò)采用3-8-3 結(jié)構(gòu)。建模表明，此RBF 網(wǎng)絡(luò)數(shù)學(xué)模型具有良好的控制品質(zhì)。
關(guān)鍵詞：半導(dǎo)體擴(kuò)散爐；RBF 神經(jīng)網(wǎng)絡(luò)；PID 溫度控制

Study on Semiconductor Diffuse Furnace Temperature Control Mondeling Based on RBF NN
CAI Bing1,2, HU Rong-yu1, Wang Pei-yuan1, LIU Chuan-qing1 (1.Department of Physics & Electronic Information Technology, XiangFan University , HuBei
XiangFan 441053, China; 2.Department of Control Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China) Abstract: According to the problem of temperature control of semiconductor diffuse furnace, an new control approach is described in the paper, such as RBF NN. the RBF NN construct is
3-8-3,simulation results show that control method has high quality.
Keywords: Semiconductor Diffuse Kiln; RBF NN; PIDTemperature Control